Nanishi, Yasushi
Yamaguchi, Tomohiro https://orcid.org/0000-0001-6548-856X
Article Title: Plasma-excited MBE—proposal and achievements through R&D of compound semiconductor materials and devices
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2022 The Japan Society of Applied Physics
Publication dates
Date Received: 2021-11-07
Date Accepted: 2021-11-24
Online publication date: 2022-01-26