Lin, Mingte
Yang, Kai Wei
King, Ya-Chin
Article Title: Evaluation of stability and robustness of poly-Si resistors with different dopant concentrations
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2022 The Japan Society of Applied Physics
Publication dates
Date Received: 2021-09-25
Date Accepted: 2021-12-23
Online publication date: 2022-02-24