Kawai, Kazuki
Takahashi, Hikaru
Omori, Tatsuya
Hashimoto, Ken-ya
Article Title: Development of a high-speed, phase-sensitive laser probe system for RF surface/bulk acoustic wave devices with an autofocus function for long-time continuous operation
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2022 The Japan Society of Applied Physics
Publication dates
Date Received: 2021-11-01
Date Accepted: 2022-01-04
Online publication date: 2022-03-22