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Analysis of propagation characteristics of Rayleigh surface acoustic waves on Yb <sub>0.33</sub> Al <sub>0.67</sub> N piezoelectric films/high-velocity substrates

Crossref DOI link: https://doi.org/10.35848/1347-4065/ac48d2

Published Online: 2022-03-22

Published Print: 2022-07-01

Update policy: https://doi.org/10.1088/crossmark-policy

Authors

Suzuki, Masashi https://orcid.org/0000-0002-7044-9474
Kakio, Shoji https://orcid.org/0000-0002-5776-1383
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Article Title: Analysis of propagation characteristics of Rayleigh surface acoustic waves on Yb 0.33 Al 0.67 N piezoelectric films/high-velocity substrates

Journal Title: Japanese Journal of Applied Physics

Article Type: paper

Copyright Information: © 2022 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.

Publication dates

Date Received: 2021-11-02

Date Accepted: 2022-01-05

Online publication date: 2022-03-22

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