Tominaga, Takumi https://orcid.org/0000-0002-9738-3022
Takayanagi, Shinji https://orcid.org/0000-0002-7288-0129
Yanagitani, Takahiko https://orcid.org/0000-0001-7704-3808
Article Title: c-Axis-tilted ScAlN films grown on silicon substrates for surface acoustic wave devices
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2022 The Japan Society of Applied Physics
Publication dates
Date Received: 2021-11-03
Date Accepted: 2022-01-10
Online publication date: 2022-05-30