Asada, Shuya
Ogino, Akihisa
Article Title: Effect of radical on defect and molecular structure of monolayer MoS 2 by low temperature plasma treatment
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2022 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2021-11-26
Date Accepted: 2022-01-12
Online publication date: 2022-04-22