Esashi, Masayoshi
Miyaguchi, Hiroshi
Kojima, Akira
Ikegami, Naokatsu
Koshida, Nobuyoshi
Ohyi, Hideyuki
Article Title: Development of a massively parallel electron beam write (MPEBW) system: aiming for the digital fabrication of integrated circuits
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2022 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2021-10-18
Date Accepted: 2022-01-19
Online publication date: 2022-06-13