Article Title: 3.4 GHz strip-type thickness shear mode solidly-mounted bulk acoustic wave resonator using X-cut LiTaO 3
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2022 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2021-11-02
Date Accepted: 2022-01-24
Online publication date: 2022-05-27