Kariya, Shingo
Matsumae, Takashi https://orcid.org/0000-0001-5767-8398
Kurashima, Yuichi
Takagi, Hideki https://orcid.org/0000-0001-6802-3346
Hayase, Masanori
Higurashi, Eiji https://orcid.org/0000-0002-7154-4203
Article Title: Simple and low-temperature vacuum packaging process by using Au/Ta/Ti metal multilayer
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2022 The Japan Society of Applied Physics
Publication dates
Date Received: 2021-11-04
Date Accepted: 2022-02-08
Online publication date: 2022-05-13