Melvin, Lawrence S. III https://orcid.org/0000-0002-6553-6688
Welling, Ulrich
Kandel, Yudhishthir
Levinson, Zachary A.
Taoka, Hironobu
Stock, Hans-Jurgen
Demmerle, Wolfgang
Article Title: Applying stochastic simulation to study defect formation in EUV photoresists
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2022 The Author(s). Published on behalf of The Japan Society of Applied Physics by IOP Publishing Ltd
Publication dates
Date Received: 2021-12-10
Date Accepted: 2022-03-06
Online publication date: 2022-05-20