Koga, Yoshihiro
Yamada, Shunsuke
Tanaka, Shuji
Kurita, Kazunari
Article Title: Laminated wafer with conductive diamond layer formed by surface-activated bonding at room temperature for micro-electro mechanical system sensors
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2022 The Author(s). Published on behalf of The Japan Society of Applied Physics by IOP Publishing Ltd
Publication dates
Date Received: 2021-11-29
Date Accepted: 2022-03-23
Online publication date: 2022-04-20