Ito, Tomoko
Kita, Hidekazu
Karahashi, Kazuhiro
Hamaguchi, Satoshi
Article Title: Low-energy ion irradiation effects on chlorine desorption in plasma-enhanced atomic layer deposition (PEALD) for silicon nitride
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2022 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-01-07
Date Accepted: 2022-03-30
Online publication date: 2022-06-13