Shibata, Takuya
Uenuma, Mutsunori https://orcid.org/0000-0002-3387-6805
Yamada, Takahiro
Yoshitsugu, Koji
Higashi, Masato
Nishimura, Kunihiko
Uraoka, Yukiharu
Article Title: Effects of carbon impurity in ALD-Al 2 O 3 film on HAXPES spectrum and electrical properties of Al 2 O 3 /AlGaN/GaN MIS structure
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2022 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-02-06
Date Accepted: 2022-04-04
Online publication date: 2022-05-24