Endo, Shinichi https://orcid.org/0000-0002-6736-3207
Article Title: Optimization of gas-flow condition for a real scale semiconductor packaging process using the Photodesmear® method
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2022 The Japan Society of Applied Physics
Publication dates
Date Received: 2022-03-05
Date Accepted: 2022-06-06
Online publication date: 2022-07-25