Otsuka, Tomoe https://orcid.org/0000-0001-9351-9845
Muroya, Yusa
Ikeda, Takuya
Komuro, Yoshitaka
Kawana, Daisuke
Kozawa, Takahiro https://orcid.org/0000-0002-0124-5240
Article Title: Sensitization mechanism of metal oxide nanocluster resists with carboxylic acid ligands
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2022 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-03-16
Date Accepted: 2022-07-01
Online publication date: 2022-07-28