Takagi, Shigeyuki
Nakaegawa, Tatsuhiro
Hsiao, Shih-Nan
Sekine, Makoto
Article Title: Estimations of secondary electron emission coefficients of Si, SiO2, and polyimide electrodes in dual-frequency capacitively coupled discharge
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2022 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-05-09
Date Accepted: 2022-07-12
Online publication date: 2022-11-11