Kito, Seiya
Urabe, Keiichiro
Eriguchi, Koji
Funding for this research was provided by:
Japan Society for the Promotion of Science (18H05849)
Article Title: Multi-harmonic analysis in a floating harmonic probe method for diagnostics of electron energy and ion density in low-temperature plasmas
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2022 The Japan Society of Applied Physics
Publication dates
Date Received: 2022-05-17
Date Accepted: 2022-08-07
Online publication date: 2022-09-06