Lin, Keren
Nezu, Atsushi
Akatsuka, Hiroshi
Article Title: Optical emission spectroscopy diagnosis of low-pressure microwave discharge helium plasma based on collisional-radiative model
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2022 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-06-09
Date Accepted: 2022-08-09
Online publication date: 2022-10-31