Hayashi, Toshio https://orcid.org/0000-0003-0810-9732
Ishikawa, Kenji https://orcid.org/0000-0002-8288-6620
Iwayama, Hiroshi
Sekine, Makoto
Hori, Masaru
Article Title: Dissociation channels of c-C4F8 to C2F4 in reactive plasma
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2022 The Japan Society of Applied Physics
Publication dates
Date Received: 2022-06-03
Date Accepted: 2022-08-11
Online publication date: 2022-10-10