Kozawa, Takahiro https://orcid.org/0000-0002-0124-5240
Article Title: Interfacial effects on sensitization of chemically amplified extreme ultraviolet resists
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2022 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-08-27
Date Accepted: 2022-09-25
Online publication date: 2022-10-18