Chen, Yang
Wu, Jinbo
Zhao, Xiaomeng
Li, Zhongxu
Ke, Xinjian
Zhang, Shibin
Zhou, Min
Huang, Kai
Ou, Xin
Funding for this research was provided by:
National Key R&D Program of China (2020YFB2008801)
Science and Technology Commission of Shanghai Municipality (21DZ1101500)
the Key Research Project of Zhejiang Laboratory (2021MD0AC01)
Article Title: Heterogeneous integration of lithium tantalate thin film on quartz for high performance surface acoustic wave resonator
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2022 The Japan Society of Applied Physics
Publication dates
Date Received: 2022-09-29
Date Accepted: 2022-11-23
Online publication date: 2022-12-23