Otomo, Masaki http://orcid.org/0000-0002-4156-0130
Hamada, Masaya http://orcid.org/0000-0002-5830-5283
Ono, Ryo
Muneta, Iriya http://orcid.org/0000-0001-7620-4948
Kakushima, Kuniyuki http://orcid.org/0000-0002-8527-1402
Tsutsui, Kazuo http://orcid.org/0000-0002-5472-5539
Wakabayashi, Hitoshi http://orcid.org/0000-0001-5509-521X
Article Title: Chemical states of PVD-ZrS2 film underneath scaled high-k film with self-oxidized ZrO2 film as interfacial layer
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2023 The Author(s). Published on behalf of The Japan Society of Applied Physics by IOP Publishing Ltd
Publication dates
Date Received: 2022-10-20
Date Accepted: 2022-11-30
Online publication date: 2023-01-09