Ohtake, Hiroto
Miyoshi, Nobuya
Shinoda, Kazunori
Fujisaki, Sumiko
Yamaguchi, Yoshihide
Article Title: Isotropic atomic layer etchings of various materials by using dry chemical removal
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2023 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-11-01
Date Accepted: 2022-12-27
Online publication date: 2023-02-06