Kaneko, Masahiro
Nishinaka, Hiroyuki https://orcid.org/0000-0003-1878-0765
Kanegae, Kazutaka
Yoshimoto, Masahiro
Article Title: Coherent growth of β-(Al x Ga1−x )2O3 alloy thin films on (010) β-Ga2O3 substrates using mist CVD
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2023 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-12-04
Date Accepted: 2023-01-05
Online publication date: 2023-01-31