Berg, Fenja
Lübben, Jan
Böttger, Ulrich
Funding for this research was provided by:
Deutsche Forschungsgemeinschaft (BO1629)
Article Title: Parameters for ferroelectric phase stabilization of sputtered undoped hafnium oxide thin films
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2023 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-11-12
Date Accepted: 2023-01-04
Online publication date: 2023-02-06