Yasunami, Takuma
Nakamura, Daisuke
Katayama, Keita
Kakimoto, Yoshiaki
Kikuchi, Toshifumi
Ikenoue, Hiroshi
Article Title: Laser doping mechanism of 4H-SiC by KrF excimer laser irradiation using SiNx thin films
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2023 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-10-21
Date Accepted: 2023-01-06
Online publication date: 2023-01-26