Porret, Clement https://orcid.org/0000-0002-4561-348X
Rengo, Gianluca https://orcid.org/0000-0002-3410-6466
Ayyad, Mustafa https://orcid.org/0000-0003-2222-8295
Hikavyy, Andriy https://orcid.org/0000-0002-8201-075X
Rosseel, Erik https://orcid.org/0000-0002-2737-8391
Langer, Robert https://orcid.org/0000-0002-1132-3468
Loo, Roger https://orcid.org/0000-0003-3513-6058
Article Title: Low temperature selective growth of Ga-doped and Ga–B co-doped germanium source/drain for PMOS devices
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2023 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-10-20
Date Accepted: 2023-01-09
Online publication date: 2023-01-31