Zhao, Biyao
Bi, Jinshun
Ma, Yue
Zhang, Jian
Wang, Yan
Fan, Linjie
Han, Tingting
Xuan, Yundong
Stempitsky, Viktor
Liu, Mengxin
Funding for this research was provided by:
National Natural Science Foundation of China under Contracts (U2241221)
Article Title: The impacts of localized backside etching on proton radiation response in SOI passive devices
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2023 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-12-26
Date Accepted: 2023-01-16
Online publication date: 2023-02-24