Okumura, Hironori https://orcid.org/0000-0002-5464-9169
Uedono, Akira
Funding for this research was provided by:
Japan Society for the Promotion of Science (21H01826)
Article Title: Mg implantation in AlN layers on sapphire substrates
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2023 The Author(s). Published on behalf of The Japan Society of Applied Physics by IOP Publishing Ltd
Publication dates
Date Received: 2022-12-19
Date Accepted: 2023-02-01
Online publication date: 2023-02-16