Ogawa, Temma
Nishinaka, Hiroyuki https://orcid.org/0000-0003-1878-0765
Shimazoe, Kazuki https://orcid.org/0000-0001-7710-0411
Nagaoka, Tatsuji
Miyake, Hiroki
Kanegae, Kazutaka
Yoshimoto, Masahiro
Article Title: Homoepitaxial growth of Ge doped β-gallium oxide thin films by mist chemical vapor deposition
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2023 The Japan Society of Applied Physics
Publication dates
Date Received: 2022-11-16
Date Accepted: 2023-02-07
Online publication date: 2023-04-03