Kawashima, Rino
Nohira, Hiroshi
Ishikawa, Ryousuke
Mitani, Yuichiro https://orcid.org/0000-0001-6448-7100
Article Title: Fabrication of metal/oxide/fluorographene/oxide/silicon capacitors and their charge trapping properties
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2023 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-12-12
Date Accepted: 2023-02-23
Online publication date: 2023-03-23