Kuboi, Nobuyuki
Matsugai, Hiroyasu
Tatsumi, Tetsuya
Kobayashi, Shoji
Hagimoto, Yoshiya
Iwamoto, Hayato
Article Title: Modeling and simulation of coverage and film properties in deposition process on large-scale pattern using statistical ensemble method
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2023 The Author(s). Published on behalf of The Japan Society of Applied Physics by IOP Publishing Ltd
Publication dates
Date Received: 2023-01-05
Date Accepted: 2023-02-23
Online publication date: 2023-03-27