Article Title: Fabrication of high-aspect-ratio SiO2 nanopillars by Si thermal oxidation for metalenses in the visible region
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2023 The Author(s). Published on behalf of The Japan Society of Applied Physics by IOP Publishing Ltd
Publication dates
Date Received: 2022-12-12
Date Accepted: 2023-02-27
Online publication date: 2023-03-23