Takakura, Ryo
Murakami, Seigo
Takigawa, Ryo
Article Title: Effect of Ar fast atom beam irradiation on alpha-Al2O3 for surface activated room temperature bonding
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2023 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-12-20
Date Accepted: 2023-03-08
Online publication date: 2023-04-20