Lorusso, Gian Francesco
De Simone, Danilo
Zidan, Mohamed
Severi, Joren
Moussa, Alain
Dey, Bappaditya
Halder, Sandip
Goldenshtein, Alex
Houchens, Kevin
Santoro, Gaetano
Fischer, Daniel
Muellender, Angelika
Mack, Chris
Kondo, Tsuyoshi
Shohjoh, Tomoyasu
Ikota, Masami
Charley, Anne-Laure
De Gendt, Stefan
Leray, Philippe
Article Title: e-beam metrology of thin resist for high NA EUVL
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2023 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-11-29
Date Accepted: 2023-03-12
Online publication date: 2023-04-14