Nagahashi, Tomoya
Karasawa, Hajime
Horiike, Ryota
Kimura, Tomoya
Shiraishi, Kenji https://orcid.org/0000-0001-5641-6986
Article Title: Comparative study of the gas phase reaction of SiCl4, SiHCl3, SiH2Cl2, and SiH3Cl by thermodynamic analysis
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2023 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-01-31
Date Accepted: 2023-03-13
Online publication date: 2023-04-14