Okazaki, Ryota https://orcid.org/0000-0002-9792-8870
Sugawara, Hirotake https://orcid.org/0000-0002-4386-9705
Article Title: Analysis of electron heating due to partial resonance in an inductively coupled plasma under confronting divergent magnetic fields
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2023 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-12-13
Date Accepted: 2023-03-15
Online publication date: 2023-04-12