Nitta, Kyohei
Sasaki, Kohei
Kuramata, Akito
Murakami, Hisashi
Article Title: Investigation of high speed β-Ga2O3 growth by solid-source trihalide vapor phase epitaxy
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2023 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-12-14
Date Accepted: 2023-03-23
Online publication date: 2023-04-14