Uno, Kazuyuki https://orcid.org/0000-0003-4477-0595
Ohta, Marika
Article Title: Control of Al composition of mist chemical vapor deposition grown α-(AlGa)2O3 alloy thin films by acetylacetonation of Al ion
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2023 The Japan Society of Applied Physics
Publication dates
Date Received: 2022-12-14
Date Accepted: 2023-03-23
Online publication date: 2023-05-09