Morimoto, Michikazu https://orcid.org/0000-0003-0565-7733
Tanaka, Motohiro
Koga, Kazunori https://orcid.org/0000-0002-9214-7493
Shiratani, Masaharu https://orcid.org/0000-0002-4103-3939
Article Title: Effect of time-modulation bias on polysilicon gate etching
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2023 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-11-29
Date Accepted: 2023-03-27
Online publication date: 2023-05-18