Morozumi, Junki
Goya, Takahiro
Kuyama, Tomohiro
Eriguchi, Koji
Urabe, Keiichiro
Article Title: In situ electrical monitoring of SiO2/Si structures in low-temperature plasma using impedance spectroscopy
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2023 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-12-30
Date Accepted: 2023-03-26
Online publication date: 2023-05-02