Ueda, Ryuto
Arimoto, Keisuke https://orcid.org/0000-0002-3766-4324
Yamanaka, Junji
Hara, Kosuke O. https://orcid.org/0000-0001-6463-6540
Article Title: Constructing the composition ratio prediction model using machine learning for BaSi2 thin films deposited by thermal evaporation
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2023 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-12-27
Date Accepted: 2023-03-26
Online publication date: 2023-04-11