Gotoh, Kazuhiro https://orcid.org/0000-0002-4877-9370
Ozaki, Ryo
Morimura, Motoo
Tanaka, Aki
Iseki, Yoshiko
Nakamura, Kyotaro
Muramatsu, Kazuo
Kurokawa, Yasuyoshi https://orcid.org/0000-0002-5319-3622
Ohshita, Yoshio
Usami, Noritaka https://orcid.org/0000-0002-0602-2847
Article Title: Impact of B2H6 plasma treatment on contact resistivity in silicon heterojunction solar cells
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2023 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-12-22
Date Accepted: 2023-03-30
Online publication date: 2023-04-27