Hirata, Akiko https://orcid.org/0000-0003-4628-2405
Fukasawa, Masanaga https://orcid.org/0000-0002-9011-8293
Tercero, Jomar Unico
Kugimiya, Katsuhisa
Hagimoto, Yoshiya
Karahashi, Kazuhiro https://orcid.org/0000-0001-9951-6573
Hamaguchi, Satoshi https://orcid.org/0000-0001-6580-8797
Iwamoto, Hayato
Article Title: High-throughput SiN ALE: surface reaction and ion-induced damage generation mechanisms
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2023 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-01-23
Date Accepted: 2023-04-18
Online publication date: 2023-06-08