Sato, Masaru
Yasuda, Mitsunobu
Takeyama, Mayumi B.
Article Title: Fundamental evaluation of orientation and grain size of Cu film in Cu/TaWN/SiO2/Si system
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2023 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-12-04
Date Accepted: 2023-05-21
Online publication date: 2023-06-08