Takata, Yui https://orcid.org/0009-0003-7702-246X
Muroya, Yusa
Kozawa, Takahiro https://orcid.org/0000-0002-0124-5240
Machida, Kohei
Enomoto, Satoshi
Naqvi, Bilal https://orcid.org/0000-0002-9080-6475
De Simone, Danilo https://orcid.org/0000-0003-3927-5207
Article Title: Reaction mechanisms of Sn-complex-side-chain polymer used for extreme ultraviolet lithography, studied by electron pulse radiolysis and γ-radiolysis
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2023 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-05-10
Date Accepted: 2023-06-20
Online publication date: 2023-07-17