Asuka, Takeshi
Ouchi, Junpei
Fujisawa, Hironori https://orcid.org/0000-0002-8497-5846
Nakashima, Seiji https://orcid.org/0000-0003-1179-1680
Article Title: Crystallization of (Hf, Zr)O2 thin films via non-heating process and their application to ferroelectric-gate thin film transistors
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
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Publication dates
Date Received: 2023-06-03
Date Accepted: 2023-07-20
Online publication date: 2023-08-10