Naito, K.
Yamaguchi, K.
Yoshimura, T.
Fujimura, N.
Article Title: The ferroelectric orthorhombic phase formation of Hf0.5Zr0.5O2 thin films on (−201) β-Ga2O3 substrate by atomic layer deposition
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2023 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-06-06
Date Accepted: 2023-07-20
Online publication date: 2023-08-09