Oshima, Yuichi https://orcid.org/0000-0001-8293-4891
Oshima, Takayoshi https://orcid.org/0000-0001-8550-9735
Article Title: Effect of the temperature and HCl partial pressure on selective-area gas etching of (001) β-Ga2O3
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2023 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-06-25
Date Accepted: 2023-08-07
Online publication date: 2023-08-21