Mochizuki, Kazuhiro https://orcid.org/0000-0002-8687-2568
Nishimura, Tomoaki https://orcid.org/0000-0002-4555-2146
Mishima, Tomoyoshi https://orcid.org/0000-0002-1332-1351
Article Title: Estimation of electronic stopping cross sections of 4H-SiC for 2–26 MeV Al random-ion implantations
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2023 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-07-13
Date Accepted: 2023-08-23
Online publication date: 2023-09-07